|
Minimum detectable helium leak rate |
|
|
|
Vacuum mode ULTRA |
mbar x l/s |
5 x 10-12 |
|
Vacuum mode FINE |
1 x 10-10 |
|
Vacuum mode GROSS |
1 x 10-7 |
|
Max. inlet pressure |
|
|
ULTRA |
mbar |
0.02 |
|
FINE |
1.2 |
|
GROSS |
12 |
|
Pumping speed during the evacuation process |
m³/h |
3.0 |
– |
|
Backing pump type |
|
scroll pump |
– |
|
Helium pumping speed in ULTRA mode |
l/s |
4.0 |
|
Response time |
s |
< 1 |
|
Run-up time (after starting) |
s |
150 |
|
Mass spectrometer |
|
90° magnetic sector field |
|
Ion source |
|
2 filaments; iridium / yttrium oxide |
|
Detectable masses |
amu |
2, 3 and 4 |
|
Inlet port |
DN |
25 ISO-KF |
|
Dimensions (W x H x D) |
mm |
480 x 506 x 320 |
|
Weight |
kg |
32 |
25 |
|
Available languages |
|
English, Japanese, Korean, Simple Chinese, Traditional Chinese, German, Spanish |
