|
Peak pumping speed |
60 |
cfm |
2.3 |
3.7 |
5.9 |
8.4 |
|
50 |
m3/h |
3.3 |
5.1 |
8.5 |
12 |
|
Ultimate pressure (Total) |
60 |
Torr |
1.5 x 10-3 (1.5 x 10-2 with PFPE) |
|
50 |
mbar |
2.0 x 10-3 (2.0 x 10-2 with PFPE) |
|
Ultimate pressure GB I (Total) |
50/60 |
Torr |
2.3 x 10-2 |
|
|
mbar |
3.0 x 10-2 |
|
Ultimate pressure GB II (Total) |
50/60 |
Torr |
9.1 x 10-2 |
7.5 x 10-2 |
4.6 x 10-2 |
4.6 x 10-2 |
|
|
mbar |
1.2 x 10-1 |
1 x 10-1 |
6.0 x 10-2 |
6.0 x 10-2 |
|
Ultimate pressure high throughput mode |
50/60 |
Torr |
2.3 x 10-2 |
|
|
mbar |
3.0 x 10-2 |
|
Water vapour tolerance |
|
Torr |
60 |
38 |
28.5 |
24 |
|
|
mbar |
80 |
50 |
38 |
32 |
|
Water vapour capacity – GB I |
|
g/h |
60 |
60 |
60 |
60 |
|
|
g/h |
220 |
220 |
220 |
290 |
|
Maximum continuous inlet pressure * |
|
High Vac mode |
|
mbar (Torr) |
up to 50 (38) |
|
High Throughput mode |
|
mbar (Torr) |
up to 500 (380) |
|
Maximum gas ballast/purge pressure |
|
mbar (Torr) |
0.5 (7) |
|
Mechanical Power 1 phase (nominal) (W) |
60 |
W |
440 |
|
50 |
W |
370 |
|
Mechanical Power 3 phase (W) |
60 |
W |
300 |
300 |
550 |
550 |
|
50 |
W |
250 |
250 |
450 |
450 |
|
Nominal rotation speed (rpm) |
60 |
rpm |
1760 |
|
50 |
rpm |
1470 |
|
Weight |
|
lb |
55 |
55 |
61.6 |
63.8 |
|
|
kg |
25 |
25 |
28 |
29 |
|
Oil capacity |
|
litres |
0.7 |
0.7 |
0.75 |
1 |
|
Oil type (ULTRAGRADE™ Performance) |
|
|
19 |
|
Inlet flange |
|
|
NW25 |
|
Exhaust flange |
|
|
NW25 |
|
Noise level @ 50 Hz |
|
dB(A) |
48 |
|
Noise level (with Acoustic Enclosure) @ 50 Hz |
|
dB(A) |
41 |
|
Operating temperature range |
|
°C |
12 to 40 |
