Technical Specifications

Unit nEXT2807M nEXT3207 M
High vacuum flange DN 250 ISO-F (CF) 320 ISO-F
Pumping speed (PNEUROP)
N2 l*s-1 2350 3200
Ar 2150 3000
H2 1850 1950
He 2500 2750
Maximum compression
Ar ≥ 1×10^ 7
H2 1×10^3
Maximum gas throughput *1*2
Ar mbar*l*s-1[sccm] 26 [1540] 26 [1540]
N2 33 [1960] 33 [1960]
Maximum forevacuum pressure mbar 1.4 1.4
Nominal/Maximum speed rpm 31800 31800
Minimum speed 18240
Backup rotational speed*3 Approximately 6000
Ultimate pressure mbar <1*10-8 (<5*10-10 )
Maximum bake-out temperature °C 120
Run-up time min ≤ 10
Forevacuum flange DN 40KF
Cooling connection Rc 1/4 (Female)
Weight, approximate kg 59 (79) 57
Noise level dB < 55