TECHNICAL SPECIFICATIONS

nEXT55 nEXT85
Inlet flange NW40 ISO-K 63/CF 63 NW40 DN63 ISO-K or DN63 CF DN100 ISO-K
Inlet pumping speed ls-1 N2 35 55 47 84 86
Ar 35 55 44 80 84
He 26 41 61 78 80/78 (D/H)
H2 17 27 49/44 (D/H) 60/54 (D/H) 60/54 (D/H)
Compression ratio (D) N2/Ar >1 x 1011
He 6.9 x 105 8 x 106
H2 2.9 x 104 2 x 105
Compression ratio (T/H) N2/Ar NA >1 x 1011
He NA 2 x 107
H2 NA 5 x 105
Backing/interstage/boost ports NW16
Vent/purge port 1/8 inch BSPP
Critical backing pressure (mbar) (D/H) 18
(T) NA
Bake out water cooled/forced air cooled max. °C 120/115°
Recommended backing pump* nXDS6i
Normal rotational speed rpm 90,000
Start time to 90% speed (sec) D/H (T) 90
Mass (kg) D/H (T) ISO 2.47 2.9 3.0 3.2
CF 3.5 4.4
nEXT240 nEXT300 nEXT300A nEXT400 nEXT400A
Inlet flange DN100 ISO-K DN100 CF DN100 ISO-K DN100 CF DN100 ISO-K DN100 CF DN160 ISO-K DN160 CF DN100 ISO-K DN100 CF
Inlet pumping speed ls-1 N2 240 300 300 300 400 400 400
Ar 230 280 340 240 380 400 400
He 230 340 280 280 390 325 325
H2 165 280 250 250 325 325 325
Compression ratio (D) N2/Ar

> 1 x 1011

> 1 x 1011
He 3 x 105 1 x 106 1 x 108 1 x 108 1 x 109
H2 1 x 104 5 x 104 4 x 106 5 x 105 4 x 106
Compression ratio (T/H) N2/Ar

> 1 x 1011

> 1 x 1011
He 1 x 106 3 x 106 13 >1 x 108 13
H2 1.5 x 104 1 x 105 13 1 x 106 13
Interstage pumping speed N2 ls-1 13 13 13 13 13
He ls-1 13 13 13 13 13
H2 ls-1 13 13 13 13 13
Ar ls-1 13 13 13 13 13
Ultimate pressure (mbar) (Torr)

< 6×10-8 mbar

< 5×10-10 mbar

< 6×10-8 mbar

< 5×10-10 mbar

< 6×10-8 mbar

< 5×10-10 mbar

< 6×10-8 mbar

< 5×10-10 mbar

< 1×10-8 mbar

< 1×10-10 mbar
Mass kg 5.7 8.7 5.8 8.5 6.0 8.8 6.2 10.0 6.5 10.2
Backing/Interstage ports NW25
Vent/purge port 1/8 inch BSPP
Critical backing pressure mbar

D/H – 9.5

T – 20

D/H – 9.5

T – 20

N2/ – 12

He – 12.5

H2 – 6

D/H – 10

T – 20

N2/ – 12

He – 12.5

H2 – 6
Bake out water cooled/forced air cooled max. °C 120/115° – – 120/115° – –
Recommended backing pump* RV12/nXDS10i RV12/nXDS10 RV12/nXDS10i RV12/nXDS10
Normal rotational speed rpm 60,000
Start time to 90% speed (sec) D/H (T) 115 (150) 145 (190) 200 180 (210) 220
Operation attitude Vertical and upright to horizontal
nEXT730Q nEXT730D nEXT730H
Inlet flange DN 160 ISO-K DN 160 CF DN 160 ISO-K DN 160 CF
Inlet pumping speed ls-1 N2 730 730 690 720 680
Ar 665 665 620 655 610
He 820 820 760 850 790
H2 715 715 670 755 710
Gas throughput mbar ls-1 N2

> 40

 14 4
Ar 6.8 3.5 2.6
He

> 50

 21 7
H2

> 40

> 14

 17
Compression ratio*** N2

> 1 x 108

> 1 x 1011

> 1 x 1013
Ar

> 1 x 108

> 1 x 1011

> 1 x 1013
He 1 x 105 1.2 x 108 5 x 109
H2 1 x 104 4 x 106 3 x 108
Ultimate pressure** (mbar)

> 1×10-7

> 7×10-9

> 3×10-10

> 7×10-9

> 1×10-10
Max. permissible backing pressure (mbar) 6 15 12
Normal rotational speed rpm 49200
Start time to 90% speed (sec) min 2.5
Max. power consumption (W) W 500 (default), 600 (max.)
Power consumption at ultimate pressure (W) W 40
Type of protection IP 54
Recommended cooling method Water* Convection*
Optional cooling n/a Air or Water*
Cooling water connection inch Plug-in connection for 6×1 hose/alternative G 1/8
Cooling water consumption I/h 60
Critical cooling water pressure bar(g) 6
Permissible cooling water temperature °C 15 to 35
Mass kg 15.4 14.6 19.6 14.6 19.6
Recommended backing pump* nXRi, XDS35i, E2M28**
Noise level with convection cooling with radial air cooler dB(A)

> 40

n/a

> 40

> 55
Water cooled/forced air cooled max. bake out °C n/a 100
Purge gas flow mbar · Is-1 0.4
sccm 24
Vent/purge port (inch) inch G 1/8
nEXT930Q nEXT930D nEXT1230H
Inlet flange DN 160 ISO-K DN 160 CF DN 200 CF DN 200 ISO-F DN 200 ISO-K
Inlet pumping speed ls-1 N2 925 925 870 1250
Ar 865 865 810 1150
He 905 905 840 1350
H2 735 735 690 1150
Gas throughput mbar ls-1 N2

> 40

 14 9
Ar 6.8 3.5 3
He

> 50

 21

> 20
H2

> 50

> 14

> 20
Compression ratio*** N2

> 1 x 108

> 1 x 1011

> 1 x 1011
Ar

> 1 x 108

> 1 x 1011

> 1 x 1011
He 1 x 105 1.2 x 108 4 x 108
H2 1 x 104 4.2 x 106 1 x 107
Ultimate pressure** mbar

> 1×10-7

> 7×10-9

> 3×10-10

> 5×10-10

> 5×10-9
Max. permissible backing pressure mbar 6 15 15
Normal rotational speed rpm 49200
Start time to 90% speed (sec) min 2.5
Max. power consumption W 500 (default), 600 (max.) 660 (default), 800 (max.)
Power consumption at ultimate pressure W 40 50
Type of protection IP 54 54
Recommended cooling method Water* Convection* Water*
Optional cooling n/a Air or Water* Forced air cooling*
Cooling water connection inch Plug-in connection for 6×1 hose/alternative G 1/8
Cooling water consumption I/h 60
Critical cooling water pressure bar(g) 6 15
Permissible cooling water temperature °C 15 to 35
Mass kg 15.4 14.6 19.6 32.6 24.9 23.7
Recommended backing pump* nXRi, XDS35i, E2M28**
Noise level with convection cooling with radial air cooler dB(A)

> 40

n/a

> 40

> 55

> 40

> 55
Water cooled/forced air cooled max. bake out °C n/a 100 n/a
Purge gas flow mbar · Is-1 0.4
sccm 24
Vent/purge port inch G 1/8